University of California, Berkeley
ELENG 143 — Microfabrication Technology
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Process Integration (IC)
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Lecture 1 Materials Intro
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Manual Kasper Mask Aligner
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Information on Course
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Flow of Fabrication Process
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CVD Kinetics Notes
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Schemes for Characterization
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Laboratory 1 Report
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Notes for Course
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Part 1 of Diffusion (Section 7)
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IC-MEMS Processing Lab for Undergraduates
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Problem Set - Microfabrication Technology
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Report for Lab 2
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Daily Lecture Notes
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Session Notes
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Metallization Section 8
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Resistance (Electrical)
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Intro to IC Devices
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Lecture Handouts
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Academic Notes
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Integration of Processes
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Layout (Section 10)
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EE143 MOSFET Device TSUPREM4 Process Simulation Results
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Design Rules for Layout
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