University of California, Berkeley
ELENG 143 — Microfabrication Technology
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CMP (Chemical Mechanical Planarization) Section 9
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Damage and Defects
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Etching Part 1
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Practice Problems
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Rules of Layout Design
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Etching I (Lec 14c)
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Contacts & Interconnects (Lec 21m)
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Class Lecture Notes
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Fabrication of MEMS
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Technology of Microfabrication
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Desc. of NMOS Fabrication Process
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Electronic Materials Microstructure
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Review for Midterm
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Modeling & Optical Projection Printing
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Solutions to Pre-Lab Quiz
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Devices Intro (Section 12)
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Metallization (Section 8)
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Silicon Thermal Oxidation
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Course Info
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Coursework
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Lab Two Report
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Second Lab Report
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Laboratory Report
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Film Deposition Part 1 (Lec 11)
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