University of California, Berkeley
ELENG 143 — Microfabrication Technology
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Oxidation & Lithography III (Lec 9c)
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Course Notes
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Future Electronics Lithography & Patterning
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Process Integration (Section 11)
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Lithography (Section 2)
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Ion Implantation (Section 6)
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Diffusion (Section 7)
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IC Microfabrication Trends
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Homework Assignment - Microfabrication Technology
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Assignment
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Layer-to-Layer Alignment Importance
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Materials Introduction (Lec 1)
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Advanced CMOS (Lec 21n)
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Etching II (Lec 15c)
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Film Deposition (Module 3)
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Thermal Bimorph (MEMS)
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Materials Intro (Section 1)
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Thin Film Deposition Part 2 (Section 5)
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Fabrication Technologies for Solar Cells
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Teaching Assistant Manual
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